SiCOH film preparation using precursors with built-in...
Silane treatment of low dielectric constant materials in...
Silica membranes and process of production thereof
Silica microstructure and fabrication method thereof
Silica thin films produced by rapid surface catalyzed vapor...
Silica-based film, method of forming the same, composition...
Silicon carbide cap layers for low dielectric constant...
Silicon carbide deposition for use as a low dielectric...
Silicon carbide deposition for use as a low-dielectric...
Silicon carbide having low dielectric constant
Silicon dioxide deposition methods using at least ozone and...
Silicon dioxide deposition methods using at least ozone and...
Silicon dioxide-oxynitride continuity film as a passivation...
Silicon germanium surface layer for high-k dielectric...
Silicon nitride and silicon dioxide gate insulator...
Silicon nitride and silicon dioxide gate insulator...
Silicon nitride deposition method
Silicon nitride deposition method
Silicon nitride deposition method for use in forming a memory ce
Silicon nitride film formation method