Silica membranes and process of production thereof

Details Silica membranes and process of production thereof Silica membranes and process of production thereof

2005-09-13

2005-09-13

Le, Thao P. (Department: 2818)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

C438S763000, C438S780000

Reexamination Certificate

active

06943123

ABSTRACT:
A method of producing a weakly branched silica membranes coated onto a substrate using a two-step catalysed hydrolysis sol-gel process. A tetraethylorthosilicate (TEOS)/ethanol solution is formed and placed in an ice bath. An acid/water solution is formed and added to the TEOS/ethanol solution, to form a TEOS/ethanol/acid/water solution, which inturn is refluxed. A two-step sol is prepared by adding water and nitric acid to the refluxed TEOS/ethanol/acid/water solution and initiating a two-step sol-gel process. From the two-step sol a membrane film layer is deposited on a substrate, for use in a number of applications, including selective separation of gases.

REFERENCES:
patent: 5858457 (1999-01-01), Brinker et al.
patent: 6536604 (2003-03-01), Brinker et al.
patent: WO/91/12879 (1991-05-01), None
patent: WO/0039028 (2000-06-01), None
Brinker, C.J. Scherer G. W. Sol-Gel Science: the physics and chemistry of the sol gel processing, Academic Press, San Diego, USA (1990) selected chapters.
Raman N. K. & Brinker C.J., Organic template approach to molecular sieving silica membranes, J. Membrane Science, 105, 273-279 (1995).
Kusakabe K., Sakamoto S., Saie T., & Morooka S., Pore structure of silica membranes formed by a sol-gel technique using tetraethyloxysilane and alkyltriethyloxysilanes, Sep. and Pur. Tech., 16, 139-146 (1999).
De Vos R. M. & Verweij H. Improved performance of silica membranes for gas separation, J. Membrane Science, 143, 37-51 (1998).
Lin C. L., Flowers D. L., & Liu P.K.T., Characterisation of ceramic membranes II., Modified commercial membranes with pore size under 40A, J. Membrane Science, 92, 45-58 (1994).
Wu J.C. S., Sabol H., Smith G.W., Flowers D.L. & Liu P.K.T., Characterisation of hydrogen-permselective -microporous ceramic membranes, J. Membrane Science, 96, 275-287 (1994).
Ha H.Y., Woo-Nam S., Hong S.A. & Lee W.K., Chemical vapour deposition of hydrogen-permselective silica film on porous glass support from tertraethylorthosilicate, J. Membrane Science, 85, 279-290 (1993).
Tsapatsis M. and Gavalas G. Structure and aging characteristics of H permselective SiO -Vycor membranes, J. Membrane Science, 87, 282-296, (1994).
Raman N. K. Anderson M.T. and Brinker C.J., Template-based Approaches to the Preparation of Amorphous Nanoporous Silicas, Chem. Mater, 8, 1682-1701.

Affiliated with

Also associated with

Rating

Silica membranes and process of production thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Silica membranes and process of production thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Silica membranes and process of production thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3401006