Method of stabilizing low dielectric constant films
Method of stress-relieving silicon oxide films
Method of supplying excited oxygen
Method of synthesizing hybrid metal oxide materials and...
Method of treating a semi-conductor wafer
Method of treating a semiconductor wafer in a chamber using...
Method of uniformly coating a substrate
Method of uniformly coating a substrate
Method of using a hard mask to grow dielectrics with varying cha
Method to avoid threshold voltage shift in thicker...
Method to deposit functionally graded dielectric films via...
Method to enhance the adhesion of silicon nitride to low-k...
Method to fill the gap between coupled wafers
Method to form a DRAM capacitor using low temperature...
Method to form zirconium oxide and hafnium oxide for high...
Method to improve adhesion between low dielectric constant layer
Method to improve the roughness of metal deposition on low-k...
Method to improve the step coverage and pattern loading for...
Method to improve the step coverage and pattern loading for...
Method to improve the uniformity and reduce the surface...