Atomic layer deposition

Atomic layer deposition method for depositing a layer

Atomic layer deposition method of forming an oxide...

Atomic layer deposition method of forming an oxide...

Atomic layer deposition methods

Atomic layer deposition methods, and methods of forming...

Atomic layer deposition of a ruthenium layer to a lanthanide...

Atomic layer deposition of hafnium-based high-k dielectric

Atomic layer-deposited hafnium aluminum oxide

Barium strontium titanate annealing process

Barrier layer and fabrication method thereof

Beta control using a rapid thermal oxidation

Bi-layer approach for a hermetic low dielectric constant...

Bi-layer capping of low-K dielectric films

Biased pulse DC reactive sputtering of oxide films

Biased pulse DC reactive sputtering of oxide films

Bilayer cap structure including HDP/bHDP films for...

Bilayer ultra-thin gate dielectric and process for...

Bis-o-nitrophenols derivatives and poly-o-hydroxyamides,...

Bonding a metal component to a low-k dielectric material