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Cryopump water drain

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump water drain

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with an exhaust filter

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with differential pumping capability

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with electronically controlled regeneration

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with exhaust filter

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with gas heated exhaust valve and method of warming sur

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with gate valve control

Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate

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Cryopump with improved adsorption capacity

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with improved second stage array

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with improved second stage passageway

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with improved shielding

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with multiple refrigerators

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with quicker adsorption

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with rapid cooldown and increased pressure

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with selective condensation and defrost

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with vibration isolation

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with vibration isolation

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump, and a method for the operation thereof

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopumping apparatus

Refrigeration – Low pressure cold trap process and apparatus
Patent

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