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Fail-safe cryopump safety purge delay

Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate

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Fast cycle water vapor cryopump

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Fast cycle water vapor cryopump

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Flexible cryogenic conduit

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Flexible cryogenic envelope

Refrigeration – Low pressure cold trap process and apparatus
Patent

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