Cryopump with vibration isolation

Refrigeration – Low pressure cold trap process and apparatus

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Details

62295, 55269, 248636, 248638, 417363, 417901, B01D 702

Patent

active

048626970

ABSTRACT:
A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes two bellows covered with vibration damping material and separated by an intermediate mass. The damping material fills the spaces between corrugations of the bellows and is bonded to the bellows. A dynamic absorber operates to attenuate vibrations of a partucular frequency from being transmitted into the refrigerator from a drive unit of the cryopump.

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Sov. Phys. Acoust. 26(4); "Damping of Tubes by a Constrained Coating"; Vinogradov et al.; Jul.-Aug. 1980; pp. 328-330.
Sov. Phys. Acoust. 26(4); Virbration Damping of Tubes by Vibration-Absorbing Coatings; Zeinetdinova et al.; Jul.-Aug. 1980; pp. 312-315.
Acta Technica Csav;"Vibration Absorbers for the Stays of Guyed Masts"; Fischer; 1987; pp. 95-111.

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