Cryopump with quicker adsorption

Details Cryopump with quicker adsorption Cryopump with quicker adsorption

1987-04-28

1988-01-12

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, 417901, B01D 800

Patent

active

047182415

ABSTRACT:
A cryopump with quicker adsorption of non-condensible gases is disclosed. The second stage cryopanel of this cryopump is comprised of an array of discs spaced along an axis perpendicular to the frontal cryopanel, and in close thermal contact with the second stage heat sink. Each disc of the array is bent toward the frontal cryopanel at the outer edge of the disc and is flat radially inward from the bend. Each disc is coated with adsorbent material on the surface away from the frontal cryopanel radially inward from the bend in the disc.

REFERENCES:
patent: 4295338 (1981-10-01), Welch
patent: 4336690 (1984-06-01), Welch
patent: 4356701 (1985-01-01), Bartlett et al.
patent: 4485631 (1984-12-01), Winkler
patent: 4494381 (1985-01-01), Lessard
patent: 4546613 (1985-10-01), Eacobacci et al.
patent: 4555907 (1985-12-01), Bartlett

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