Refrigeration – Low pressure cold trap process and apparatus
Patent
1986-11-14
1989-05-30
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
55269, 248638, 417363, 417901, B01D 800
Patent
active
048338990
ABSTRACT:
A vibration isolator particularly suited to isolating a closed cycle refrigerator in a cryopump includes two bellows covered with vibration damping material and separated by an intermediate mass. The damping material fills the spaces between corrugations of the bellows and is bonded to the bellows.
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Capossela Ronald C.
Helix Technology Corporation
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