Cryopump, and a method for the operation thereof

Details Cryopump, and a method for the operation thereof Cryopump, and a method for the operation thereof

1986-10-22

1988-07-19

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 622283, 417901, B01D 800

Patent

active

047576898

ABSTRACT:
The invention relates to a cryopump having a casing (1), a gas inlet opening (8) to which a chamber (30) can be attached through a valve (31), a vacuum pump (18) connected through a valve (16) to the casing, a two-stage refrigerator (4) in the casing as cold source, and pumping surfaces (7, 9, 12, 13) which, on both of the refrigeration stages (5, 11) of the refrigerator, are equipped with an electrical heating means (23, 24). To achieve a great shortening of the time required for regeneration and start-up it is proposed that a sensor (41) be provided to monitor the pressure within the pump casing, and that a control unit (28) be present by which the operation of the cryopump can be monitored and controlled on the basis of the signals supplied by the sensor.

REFERENCES:
patent: 3585807 (1971-06-01), Hengevoss et al.
patent: 4361418 (1982-11-01), Tscheppe
patent: 4667477 (1987-05-01), Matsuda et al.
patent: 4668261 (1987-05-01), Chatzipetros

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