Cryopump with gas heated exhaust valve and method of warming sur

Details Cryopump with gas heated exhaust valve and method of warming sur Cryopump with gas heated exhaust valve and method of warming sur

1996-04-12

1999-05-25

Bennett, Henry A.

Refrigeration

Low pressure cold trap process and apparatus

62100, 62116, 62268, 62500, 55269, B01D 800

Patent

active

059061022

ABSTRACT:
A cryopump having a cryopump chamber includes a purge gas valve coupled to the cryopump chamber for supplying a first quantity of warm gas to the cryopump chamber in order to purge the cryopump chamber during regeneration. A roughing valve couples the cryopump chamber to a roughing pump enabling the cryopump chamber to be roughed. An exhaust valve is coupled to the cryopump chamber for exhausting gases from the cryopump chamber during purge. A delivery valve is coupled to the exhaust valve for delivering a second quantity of warm gas directly onto surfaces of the exhaust valve for warming the surfaces of the exhaust valve.

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patent: 4269147 (1981-05-01), Vorbeck
patent: 4339927 (1982-07-01), Sarcia
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patent: 4555907 (1985-12-01), Bartlett
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patent: 5131440 (1992-07-01), Quinn
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patent: 5165246 (1992-11-01), Cipolla et al.
patent: 5209764 (1993-05-01), Eberling
patent: 5301723 (1994-04-01), Goode

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