Cryopump with rapid cooldown and increased pressure

Details Cryopump with rapid cooldown and increased pressure Cryopump with rapid cooldown and increased pressure

1984-12-20

1985-10-15

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62100, 62268, 417901, B01D 800

Patent

active

045466130

ABSTRACT:
In a cryopump, condensation of gases such as argon, oxygen and nitrogen on surfaces other than the second stage array 38, 40 is avoided to prevent cross over hang up and pressure instability. To prevent condensation of argon, oxygen and nitrogen on the frontal cryopumping array 46, that array is held to a temperature of at least 50.degree. K. A heat load to the first stage increases as the temperature of the first stage drops. That heat load is provided by a high emissivity radiation shield 44 or by a thermal switch 56, 58. Condensation of argon and other gases on the second stage refrigerator cylinder 32 is avoided by a close fitting sleeve 52 positioned over the refrigerator cylinder 32 in thermal contact with the second stage heat sink 30 but out of thermal contact with the cylinder 32.

REFERENCES:
patent: 3122896 (1964-03-01), Hickey
patent: 3130562 (1964-04-01), Wood et al.
patent: 3131396 (1964-04-01), Santeler et al.
patent: 3218815 (1965-11-01), Chellis et al.
patent: 4311018 (1982-01-01), Welch
patent: 4356701 (1982-11-01), Bartlett et al.
Welch, Kimo M. and Chris Flegal, "Helium Cryopumping", Industrial Research/Development, Mar. 1979, pp. 83-88.
Singer, Peter H., "Update of Cryogenic Pumps", Semiconductor International, Oct. 1982, pp. 89-99.
CTI-Cryogenics Manual, "Operation and Maintenance Instructions with Illustrated Parts Breakdown, Cropump System", 1976, 1977.

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