Cryopump with improved second stage passageway

Details Cryopump with improved second stage passageway Cryopump with improved second stage passageway

1991-01-30

1992-10-20

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 417901, B01D 800

Patent

active

051560070

ABSTRACT:
Condensation on a cryopump second stage refrigerator cylinder is prevented by arranging a passageway between a colder second stage cylinder shield in thermal contact with the coldest section of the second stage and a warmer radiation shield in thermal contact with the warmer first stage. This arrangement produces a uniform and significant temperature differential in the passageway. The passageway is arranged so that the ratio of its length, L, to its width, W, is ideally greater than five. This ensures molecular collisions with the cold surface of the cylinder shield so that gas molecules are tightly bound to the cylinder shield. As a result, condensation on the refrigerator cylinder and resultant pressure variations are prevented.

REFERENCES:
patent: 4356701 (1982-11-01), Bartlett et al.
patent: 4449373 (1984-05-01), Peterson et al.
patent: 4479360 (1984-10-01), Bachler et al.
patent: 4514204 (1985-04-01), Bonney et al.
patent: 4546613 (1985-10-01), Eacobacci et al.
patent: 4555907 (1985-12-01), Bartlett
patent: 4611467 (1986-09-01), Peterson
patent: 4815303 (1989-03-01), Duza
patent: 4838035 (1989-06-01), Carlson et al.

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