Cryopump with multiple refrigerators

Details Cryopump with multiple refrigerators Cryopump with multiple refrigerators

1989-10-17

1990-10-30

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

62268, 55269, 417901, B01D 800

Patent

active

049660160

ABSTRACT:
The present invention relates to a cryopump with multiple cooling sufaces, each cooled independently by a closed-cycle refrigerator. Specifically, a primary pumping surface is cooled by a first, two-stage refrigerator independently from the radiation shield, which is cooled by a second, single-stage refrigerator.

REFERENCES:
patent: 3119243 (1964-01-01), Hnilicka, Jr. et al.
patent: 4148196 (1979-04-01), French et al.
patent: 4150549 (1979-04-01), Longsworth
patent: 4240262 (1980-12-01), Nakamura et al.
patent: 4311018 (1982-01-01), Welch
patent: 4449373 (1984-05-01), Peterson et al.
patent: 4584839 (1986-04-01), Jensen et al.

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