Cryopump with improved adsorption capacity

Details Cryopump with improved adsorption capacity Cryopump with improved adsorption capacity

1983-05-13

1985-01-22

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, 415 90, 417901, B01D 800

Patent

active

044943814

ABSTRACT:
A cryopump 20 with increased adsorptive capacity comprising a honeycomb adsorption structure 46 positioned within a second stage chevron assembly 40. Multiple chambers 58 of the honeycomb are covered with adsorbent charcoal 68. The entire structure 46 is attached to a second stage 52 of a cryogenic refrigerator 45.

REFERENCES:
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patent: 3309844 (1967-03-01), Hemstreet et al.
patent: 3335550 (1967-08-01), Stern
patent: 3416326 (1968-12-01), Stuffer
patent: 3490247 (1970-01-01), Wing
patent: 3502596 (1970-03-01), Sowards
patent: 4198829 (1980-04-01), Carle
patent: 4295338 (1981-10-01), Welch
Liu et al.; "On Cryosorption Pumping of Hydrogen with the ZDB-150 Type Cryopump Cooled by a Two Stage Closed-Cycle Refrigerator" Journal of Vacuum Science Technology, vol. 20, No. 4, Apr. 1982, pp. 1000-1004.

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