Cryopump with exhaust filter

Details Cryopump with exhaust filter Cryopump with exhaust filter

1985-07-19

1987-04-07

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, 417901, B01D 800

Patent

active

046550461

ABSTRACT:
An exhaust port from a cryopump vacuum vessel leads to an exhaust valve. The valve is protected from contamination by a filter standpipe which extends from the exhaust port into the vacuum vessel and which is open at its end opposite to the exhaust port. The standpipe is of porous material which allows the free flow of gas, water, and liquid cryogens therethrough while retaining contaminating debris within the vacuum vessel. The filter conduit is of screen formed into a cylinder. One end is tapered and pressed into the exhaust conduit. The screen cylinder is stopped in the exhaust conduit by a circumferential ridge.

REFERENCES:
patent: 3552485 (1971-01-01), Le Jannou et al.
patent: 4311023 (1982-01-01), Watral
patent: 4446702 (1984-05-01), Peterson et al.

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