Cryopump with improved shielding

Details Cryopump with improved shielding Cryopump with improved shielding

1997-02-05

1998-07-21

Kilner, Christopher

Refrigeration

Low pressure cold trap process and apparatus

417901, B01D 800

Patent

active

057820961

ABSTRACT:
A cryopump includes a two-stage refrigerator, a primary pumping surface, and a radiation shield. The radiation shield is in thermal contact with the first stage of the refrigerator. The primary pumping surface is surrounded by the radiation shield and is in thermal contact, through a direct conductive link, with the second stage of the refrigerator. The refrigerator, however, is external to the radiation shield.

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Longsworth, R.C., et al., "Cryopump vacuum recovery after pumping Ar and H.sub.2," J. Vac. Sci. Technol., 9(5):2766-2770, (1991).

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