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Integrated phase separator for ultra high vacuum system

Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate

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Integrated rough/purge/vent (RPV) valve

Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate

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Integration of automated cryopump safety purge

Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate

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Integration of automated cryopump safety purge

Refrigeration – Low pressure cold trap process and apparatus
Reexamination Certificate

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