Cryopump with an exhaust filter

Details Cryopump with an exhaust filter Cryopump with an exhaust filter

1998-01-21

1999-11-02

Kilner, Christopher B.

Refrigeration

Low pressure cold trap process and apparatus

417901, 137549, B01D 800

Patent

active

059748095

ABSTRACT:
A filter standpipe is mounted within a relief conduit of a cryopump. The relief conduit is joined to an exhaust conduit, and the exhaust conduit is joined to a housing which defines a vacuum chamber. The relief conduit and exhaust conduit define passages which are in fluid communication with one another and also with the vacuum chamber. The filter standpipe extends, from where it is mounted in the relief passage into the exhaust passage. A method for installing the filter standpipe includes the steps of removing a relief valve from a mount on the end of the relief conduit, inserting the filter standpipe through the mount, and remounting the relief valve.

REFERENCES:
patent: 4655046 (1987-04-01), Eacobacci et al.
patent: 4697617 (1987-10-01), Bourke et al.
patent: 4719938 (1988-01-01), Pandorf
patent: 4834136 (1989-05-01), Bourke et al.
patent: 5137050 (1992-08-01), Clarke et al.
patent: 5211022 (1993-05-01), Bartlett et al.
patent: 5228299 (1993-07-01), Harrington et al.
patent: 5333466 (1994-08-01), Harrington et al.
patent: 5400604 (1995-03-01), Hafner et al.
patent: 5465584 (1995-11-01), Mattern-Klosson et al.

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