Acetylene terminated, branched polyphenylene resist and protecti

Details Acetylene terminated, branched polyphenylene resist and protecti Acetylene terminated, branched polyphenylene resist and protecti

1981-06-24

1982-07-13

Smith, John D.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Electron beam imaging

430281, 430286, 430311, 430319, 430329, 430330, 427 96, 427 82, H01L 2194, H01L 21312

Patent

active

043395260

ABSTRACT:
A protective coating is formed on an integrated circuit device by coating the device with a solution of acetylene terminated, branched polyphenylene prepolymer material and heating the material to form a thermoset crosslinked polymer layer. Selectively patterned portions may be provided when, after the coating step and prior to the heating step, the steps of imagewise exposure to radiation and rinsing with an organic solvent are carried out.

REFERENCES:
patent: 3627529 (1971-12-01), Frank et al.
patent: 3822134 (1974-07-01), Rasch et al.
patent: 3882073 (1975-05-01), Cessna, Jr.
patent: 4017340 (1977-04-01), Yerman
patent: 4164458 (1979-08-01), Patel
patent: 4238528 (1980-12-01), Angelo
patent: 4247613 (1981-01-01), Ott
patent: 4262073 (1981-04-01), Pampalone

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