Aqueous developable poly(olefin sulfone) terpolymers

Details Aqueous developable poly(olefin sulfone) terpolymers Aqueous developable poly(olefin sulfone) terpolymers

1980-12-23

1982-07-27

Welsh, John D.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Electron beam imaging

430329, 430311, G03F 710

Patent

active

043418619

ABSTRACT:
This invention relates to novel terpolymers of 3-methylcyclopentene, 2-cyclopentene-1-acetic acid and sulfur dioxide. Positive electron beam resist media prepared from the subject terpolymers possesses excellent sensitivity and development latitude and unexpectedly are developable with conventional aqueous alkaline developers.

REFERENCES:
patent: 3898350 (1975-08-01), Gipstein et al.

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