4. Radiant energy
  5. With charged particle beam deflection or focussing
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Calibration method for electron beam exposer

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Cathodoluminescence detector utilizing a hollow tube for directi

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Charge amplifier with bias compensation

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Charge measuring device with wide dynamic range

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Charged beam applying apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Charged particle accelerator grating

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Charged particle apparatus comprising a beam discriminator

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Charged particle beam acceleration and extraction method and...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Charged particle beam apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Charged particle beam apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Charged particle beam apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Charged particle beam apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Charged particle beam apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Charged particle beam apparatus

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Charged particle beam apparatus and charged particle beam...

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Charged particle beam apparatus and charged particle beam...

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Charged particle beam apparatus and charged particle beam...

Radiant energy – With charged particle beam deflection or focussing – With target means
Reexamination Certificate

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Charged particle beam apparatus and method utilizing liquid meta

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Charged particle beam apparatus with charge-up compensation

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Charged particle beam apparatus, charged particle beam...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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