Charged particle beam apparatus with charge-up compensation

Details Charged particle beam apparatus with charge-up compensation Charged particle beam apparatus with charge-up compensation

1990-09-10

1991-09-03

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With target means

250396ML, 250396R, 250311, H01J 3726

Patent

active

050457055

ABSTRACT:
A charged particle beam apparatus comprising a particle source for generating a particle beam to irradiate a specimen located in a field space of a particle lens of the apparatus is provided with an auxiliary particle source for generating a particle beam of low energy particle to be injected into the lens field space and to be directed to the surface of the specimen by the same lens field.

REFERENCES:
patent: 2890342 (1959-06-01), Columbe
patent: 3731094 (1973-05-01), Le Poole
patent: 4209698 (1980-06-01), Hoppe
patent: 4303930 (1981-12-01), Van Gorkom et al.
patent: 4306149 (1981-12-01), Le Poole et al.
patent: 4820898 (1989-04-01), Slingerland
patent: 4939360 (1990-07-01), Sakai

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