Charged particle beam apparatus and charged particle beam...

Details Charged particle beam apparatus and charged particle beam... Charged particle beam apparatus and charged particle beam...

2007-07-09

2009-11-03

Berman, Jack I (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S491100

Reexamination Certificate

active

07612347

ABSTRACT:
A charged particle beam apparatus in accordance with one preferred form of this invention includes an irradiation unit for irradiating a charged particle beam, an instrumentation unit which performs instrumentation of a reflection signal from a mark as obtained by scanning the mark while irradiating the charged particle beam onto the mark, and a measurement unit which uses an approximation equation defined by use of a prespecified mark shape function and an error function to perform the fitting of a waveform obtained based on the reflection signal and which measures beam resolution which becomes a parameter of the error function from the waveform obtained based on the reflection signal.

REFERENCES:
patent: 4336597 (1982-06-01), Okubo et al.
patent: 4675528 (1987-06-01), Langner et al.
patent: 4-242919 (1992-08-01), None
patent: 2007188671 (2007-07-01), None

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