Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

1982-12-16

1985-06-18

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With detector

250396R, 2504911, G01K 108, H01J 300

Patent

active

045242771

ABSTRACT:
A charged particle beam apparatus in which a beam of charged particles emitted from a beam source is focussed on a target in a predetermined size and shape through a plurality of aperture members. Each of the aperture members is combined with a respective deflecting unit which effects a two-dimensional scan with the charged particle beam in response to a scan signal supplied thereto. The center axis of the aperture formed in the aperture member is arithmetically determined on the basis of time-based variation in the quantity of the charged particles trapped by the aperture member during the scan operation. Further, deviation of the arithmetically determined center axis of the aperture from a reference axis is determined. The aperture member is slided on a plane extending perpendicularly to the center axis of the aperture to cancel out the deviation.

REFERENCES:
patent: 4000440 (1976-12-01), Hall et al.
patent: 4424448 (1984-01-01), Takigawa et al.

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