Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

1989-04-27

1990-12-11

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396R, H01J 320

Patent

active

049773240

ABSTRACT:
A Variable Axis Lens system comprises at least two lenses which are arranged to be radially offset with respect to an optical axis of the apparatus. Because the lenses do not contain iron, the occurrence of disturbing eddy currents can be prevented. The lenses for axis displacement are preferably constructed as single ring conductors, a number of which can be readily arranged in one plane in a partly overlapping fashion. Such a system can also be arranged behind the object. For the lenses for axis displacement use is preferably made of a ceramic superconducting material having a comparatively high temperature coefficient and a comparatively high specific heat in the superconducting phase, so that they can be simply cooled from the outside.

REFERENCES:
patent: 4330709 (1982-05-01), de Chambost
patent: 4376249 (1983-03-01), Pfeiffer et al.
patent: 4544846 (1985-10-01), Langner
patent: 4564763 (1986-01-01), Bruel et al.
patent: 4701623 (1987-10-01), Beasley

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