Charged particle beam apparatus and charged particle beam...

Details Charged particle beam apparatus and charged particle beam... Charged particle beam apparatus and charged particle beam...

2007-10-16

2007-10-16

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With target means

C250S3960ML, C250S3960ML

Reexamination Certificate

active

11185871

ABSTRACT:
A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam4is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses6and7off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens7when the beam is inclined can be canceled by an aberration produced by the other lens6.

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