Charged beam applying apparatus

Details Charged beam applying apparatus Charged beam applying apparatus

1997-02-25

1999-09-07

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

2505051, H01J 4922

Patent

active

059490764

ABSTRACT:
A charged beam applying apparatus comprises a column at least having a charged beam generation section and optical system for controlling the charged beam and a chamber for holding a specimen in place which is exposed with the charged beam. At least one inner portion of the column is formed of a specific material whose an atomic number is equal or less than 22. When a contamination is cleaned off in the column through the utilization of an oxidation effect, an oxide film is sometimes formed inside the column. The electric charging of the oxide film causes a beam control error. The specific material such as the metal of the atomic number causes very much less such error. This is because such specific material involves less emission of secondary electrons and less electric charging in the oxide film formed.

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patent: 5312519 (1994-05-01), Sakai et al.
patent: 5343047 (1994-08-01), Ono et al.
patent: 5466942 (1995-11-01), Sakai et al.
patent: 5539211 (1996-07-01), Ohtoshi et al.

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