Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

1991-04-18

1993-02-16

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, H01J 310

Patent

active

051873710

ABSTRACT:
A charged particle beam apparatus includes at least a charged particle source and an objective lens for converging onto a sample a charged particle beam emitted by the charged particle source. The objective lens is an electrostatic objective lens constituted by a first and a second electrode positioned opposite to each other and having openings through which the charged particle beam passes. The first electrode and the second electrode are located close to the charged particle source and to the sample, respectively. The first electrode is supplied with a positive potential as opposed to the second electrode when the charged particle beam is a negatively charged particle beam. Conversely, the first electrode is supplied with a negative potential as opposed to the second electrode when the charged particle beam is a positively charged particle beam. The principal plane of the electrostatic objective lens is located on the side of the sample below the bottom plane of the second electrode. This constitution allows the apparatus to be very small in size and to provide high resolution for observation.

REFERENCES:
patent: 3614520 (1971-10-01), Coleman
patent: 4059783 (1977-11-01), Nakaizumi et al.
patent: 4389571 (1983-06-01), Crewe
patent: 4551599 (1985-11-01), Liebl
patent: 4556798 (1985-12-01), McKenna et al.
patent: 4663525 (1987-05-01), Ohtsuki et al.
patent: 4710632 (1987-12-01), Ishitani et al.
patent: 4725736 (1988-02-01), Crewe
patent: 4785176 (1988-11-01), Frosien et al.
patent: 4831266 (1989-05-01), Frosien et al.
patent: 4896036 (1990-01-01), Rose et al.
patent: 4926054 (1990-05-01), Frosien
patent: 4963748 (1990-10-01), Szilagyi
patent: 5061856 (1991-10-01), Frosien

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