Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

1983-02-14

1985-10-08

Smith, Alfred E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, 250396ML, H01J 314

Patent

active

045462585

ABSTRACT:
The apparatus, which may be an electron beam column, has a lens system for coarse- and fine-focus adjustments of the beam. The coarse-focus is effected by a magnetic lens (10) and the fine-focus by an electric lens (14) in parallel with the magnetic lens. The electric lens may comprise a plurality of electrically conductive cylinders (14a to 14d) inside the magnetic lens. The cylinders are so arranged that, by applying appropriate potentials to them, fine-focus adjustments can be carried out without causing the beam to rotate.

REFERENCES:
patent: 4110622 (1978-08-01), Trotel

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