Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-01-21
2009-02-17
Berman, Jack I (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S492200, C250S306000, C250S307000, C250S311000, C250S3960ML
Reexamination Certificate
active
07491945
ABSTRACT:
A charged particle beam apparatus includes: a charged particle beam generator which generates a charged particle beam; a projection optical system which generates a lens field to focus the charged particle beam on an external substrate; and deflectors arranged so as to surround an optical axis of the charged particle beam; the deflectors generating a deflection field which is superposed on the lens field to deflect the charged particle beam and to control a position to irradiate the substrate, and being configured so that intensity of the deflection field in a direction of the optical axis is changed in accordance with an angle with which the charged particle beam should fall onto the substrate.
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Berman Jack I
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Logie Michael J
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