4. Radiant energy
  5. With charged particle beam deflection or focussing
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Vacuum chamber for treating workpieces with beams

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Variable axis electron beam projection system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Variable axis immersion lens electron beam projection system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Variable curvilinear axis deflection means for particle optical

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Variable strength beam line multipole permanent magnets and meth

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Variable strength focusing of permanent magnet quadrupoles while

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Variable-ratio double-deflection beam blanker

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Virtual mask digital electron beam lithography

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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