Cathodoluminescence detector utilizing a hollow tube for directi

Details Cathodoluminescence detector utilizing a hollow tube for directi Cathodoluminescence detector utilizing a hollow tube for directi

1988-09-01

1990-02-13

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With detector

250310, 250306, 250216, 356225, H01J 37244

Patent

active

049009320

ABSTRACT:
A detector is disclosed which includes an elliptical hollow mirror and a tube having a reflecting inner surface for conducting the light emitted by a specimen under investigation in a scanning electron microscope. A vacuum window is seated at the outer end portion of the tube directly ahead of a receiver.

REFERENCES:
patent: 3790781 (1974-01-01), Horl et al.
patent: 4463257 (1984-07-01), Simpkins et al.
patent: 4597665 (1986-07-01), Galbraith et al.
Article, "Verbessertes Ellipsenspiegel-Detektorsystem fur die Kathodolumineszenz-Rasterelektronenmikroskopie" by E. M. Horl in Beitrage electronenmikroskopischer Direktabbildungen von Oberflachen, 8, p. 369, (1975).

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