4. Radiant energy
  5. With charged particle beam deflection or focussing
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Quadrupole device for projection lithography by means of...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Quadrupole singlet focusing for achromatic parallel-to-parallel

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Quick-acting electron-optical lenses

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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