Charged particle apparatus comprising a beam discriminator

Details Charged particle apparatus comprising a beam discriminator Charged particle apparatus comprising a beam discriminator

1988-08-08

1990-10-09

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, 250398, H01J 37147

Patent

active

049623087

ABSTRACT:
For the selection of a pure electron beam or ion beam from a mixed beam, use is made of a combined electrostatic/magnetic deflection system, the electrostatic deflection system being formed, for example, by a tilted electrode system of a cascade system of electrodes present in the apparatus. The pure beam is directed onto an object to be irradiated as near to the object as possible in order to prevent renewed mixing.

REFERENCES:
patent: 4335309 (1982-06-01), Anger et al.
patent: 4687940 (1987-08-01), Ward et al.
patent: 4755685 (1988-07-01), Kawanami et al.
patent: 4835399 (1989-05-01), Hosaka et al.

Affiliated with

Also associated with

Rating

Charged particle apparatus comprising a beam discriminator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle apparatus comprising a beam discriminator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle apparatus comprising a beam discriminator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-975299