Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2008-06-27

2010-11-23

Souw, Bernard E (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S310000, C250S311000

Reexamination Certificate

active

07838840

ABSTRACT:
A charged particle beam apparatus for measuring and inspecting a sample having some parts in focus and other parts out of focus in an image due to the effect of the roughness of the sample surface is disclosed, in which in order to acquire a clear image of the whole or a predetermined area in the image, the focus adjustment conditions for each point in the area to be scanned by the charged particle beam are determined in advance, and the focus adjustment conditions thus determined are applied selectively to the patterns formed under the same fabrication conditions as the sample for which the focus adjustment conditions are determined.

REFERENCES:
patent: 6538249 (2003-03-01), Takane et al.
patent: 7705300 (2010-04-01), Morokuma et al.
patent: 2004/0211899 (2004-10-01), Ezumi et al.
patent: 2005/0092921 (2005-05-01), Nakasuji et al.
patent: 2005/0236570 (2005-10-01), Morokuma et al.
patent: 2007/0200947 (2007-08-01), Kobaru et al.
patent: 2008/0099697 (2008-05-01), Watanabe et al.
patent: 05-003013 (1993-01-01), None

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