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Beam processing apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam recording apparatus and beam adjustment method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam scanning control device for ion implantation system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam scanning method and apparatus for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam sharing method and apparatus for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam source for production of radicals and metastables

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam space-charge compensation device and ion implantation...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam stop and beam tuning methods

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam stop for use in an ion implantation system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam uniformity and angular distribution measurement system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Bean scanning and method of use for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Bellows liner for an ion beam implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Bi mode ion implantation with non-parallel ion beams

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Biased and serrated extension tube for ion implanter electron sh

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Blanking aperture array type charged particle beam exposure

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Block mask and charged particle beam exposure method and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Boron ion sources for ion implantation apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Bright beam method for super-resolution in e-beam lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Broad beam flux density control

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Broad beam ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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