Bellows liner for an ion beam implanter

Details Bellows liner for an ion beam implanter Bellows liner for an ion beam implanter

2007-04-17

2007-04-17

Berman, Jack I. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

Reexamination Certificate

active

10956817

ABSTRACT:
An ion beam implanter includes ion beam forming and directing apparatus and an implantation station where workpieces are implanted with ions from an ion beam. The beam travels along an evacuated path from an ion source to the implantation station. A flexible bellows couples the implantation station to the beam forming and directing apparatus permitting the implantation station to be pivoted with respect to the beam forming and directing apparatus and thereby change an implantation orientation of the workpieces with respect to the ion beam. A replaceable, flexible bellows liner is disposed within an interior region of the bellows to reduce the volume of implantation byproducts deposited on an interior surface of the bellows.

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5 pg PCT Int'l Search Report (Form PCT/ISA/210) fm corresponding PCT Int'l Appl. No. PCT/US2005/036567, Int'l Filing Date: Sep. 28, 2005; Priority Date: Oct. 1, 2004.

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