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Apparatus for implanting ion microbeam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for ion beam work

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for ion implantation including contactless cooling and

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for irradiating a target on two opposite faces by mean

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for irradiating a target volume

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for irradiation with electron beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for maintaining ion bombardment beam under improved va

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for making a rastered photoconductive layer

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for making homogeneous the implantation of ions on the

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for manufacturing a semiconductor device and a...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for manufacturing a semiconductor device and a...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for measuring a position of an ion beam profiler...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for monitoring ion-implantation input parameter in...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for positioning a stage

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus for producing secondary electrons, a secondary...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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