Apparatus for irradiation with electron beam

Details Apparatus for irradiation with electron beam Apparatus for irradiation with electron beam

1974-09-09

1976-03-02

Willis, Davis L.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

A61K 2702

Patent

active

039420175

ABSTRACT:
An irradiation apparatus with high energy electrons is disclosed in which a wire shaped or linear object to be irradiated is moved back and forth many times under an electron window so as to irradiate it with an electron beam. According to one feature of the invention, an electron beam, which leaks through gaps between the objects to be irradiated or which penetrates the objects to be irradiated, is reversed by a magnetic field approximately perpendicular to the scanning face of the electron beam by means of a magnet which is disposed under the objects to be irradiated, and the reversed electron beam is thereby again applied to the objects to be irradiated. A high utilization rate of the electron beam is accomplished, and the objects can be thereby uniformly irradiated with the electron beam.

REFERENCES:
patent: 3687716 (1972-08-01), Steigerwald

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