Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2006-08-01
2008-12-09
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S491100, C250S492200, C250S442110
Reexamination Certificate
active
07462846
ABSTRACT:
In an embodiment, an ion beam profiler center measuring apparatus is releasably mounted to the ion beam profiler and measures a center position of an ion beam profiler using a laser beam. Accurate data for a profiler center position may be obtained without direct contact with a platen. A procedure to measure and adjust a center position of the ion beam profiler may be easily performed regardless of an operator's dexterity, requiring relatively little time.
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English language abstract of Korean Publication No. 0117463.
English language abstract of Korean Publication No. 2001-0028484.
English language abstract of Korean Publication No. 2002-0037849.
Marger & Johnson & McCollom, P.C.
Samsung Electronics Co,. Ltd.
Wells Nikita
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