Apparatus for making homogeneous the implantation of ions on the

Details Apparatus for making homogeneous the implantation of ions on the Apparatus for making homogeneous the implantation of ions on the

1991-03-20

1992-01-28

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504421, H01J 37317

Patent

active

050846248

ABSTRACT:
Apparatus for making homogeneous the implantation of ions on the surface of planar samples placed on supports distributed within a rotary drum. Preferably magnetic means for rotating these supports make it possible to bring the samples beneath the ion beam with different angles during each revolution of the drum and thus prevent problems associated with the channelling of the ions in the samples.

REFERENCES:
patent: 4155011 (1979-05-01), Mark
patent: 4733087 (1988-03-01), Narita et al.
Patent Abstracts of Japan, vol. 13, No. 571 (E-862) (3919). 11/18/1989 & JP-A-1 239 747 (Nissin Electric Co. Ltd.) 12/25/1989.
Patent Abstracts of Japan, vol. 9, No. 193 (E-334) (1916) 9/08/1985 & JP-A-6 059 646 (Hitachi Seisakusho K.K.) 6/04/1985.
Patent Abstracts of Japan, vol. 11, No. 367 (E-561) (2814) 11/28/1987 & JP-A-62 139 241 (Hitachi Seisakusho K.K.) 06/22/1987.

Affiliated with

Also associated with

Rating

Apparatus for making homogeneous the implantation of ions on the does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for making homogeneous the implantation of ions on the, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for making homogeneous the implantation of ions on the will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1862669