Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1978-06-27
1980-05-06
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250396ML, H01J 3700
Patent
active
042019206
ABSTRACT:
Apparatus for irradiating the two opposite faces of a target by means of a scanning beam and comprising a magnetic deflection system formed by an electromagnet provided with two pole pieces disposed downstream of the target to be irradiated, the length of the pole pieces corresponding to the amplitude of the scanning beam in such a way that, if .theta.=.theta..sub.1 +.theta..sub.2 is the total scanning angle, the scanning beam of angle .theta..sub.1 impinges on one face of the target, while the scanning beam of angle .theta..sub.2 =.theta.-.theta..sub.1 is deflected in the magnetic deflection system and irradiates the other face, the polepieces having a face, so-called useful face, facing the other face of the target and comprising several sections with different curvatures for obtaining a reflected beam substantially perpendicular to this other face of the target.
REFERENCES:
patent: 2897365 (1959-07-01), Dewey et al.
patent: 2931903 (1960-04-01), Van De Graaf et al.
patent: 3629578 (1971-12-01), Le Poole
patent: 3942017 (1976-03-01), Uehara et al.
patent: 4075496 (1978-02-01), Uehara
Levaillant Claude
Tronc Dominique
"C.G.R. MeV"
Anderson Bruce C.
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