Apparatus for producing secondary electrons, a secondary...

Details Apparatus for producing secondary electrons, a secondary... Apparatus for producing secondary electrons, a secondary...

2003-11-21

2008-08-26

Nguyen, Kiet T (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S251000

Reexamination Certificate

active

07417240

ABSTRACT:
An apparatus includes a primary electrode and an acceleration electrode. The acceleration electrode or, alternatively, an additional secondary electrode contains a slot that extends obliquely through the acceleration electrode or through the secondary electrode. This measure allows secondary electrons to be produced in a highly effective manner.

REFERENCES:
patent: 3395306 (1968-07-01), Coles
patent: 3564323 (1971-02-01), Maeda
patent: 3976905 (1976-08-01), Seidman et al.
patent: 4093562 (1978-06-01), Kishimoto
patent: 4914292 (1990-04-01), Tamai et al.
patent: 4916311 (1990-04-01), Fuzishita et al.
patent: 5138169 (1992-08-01), Yamazaki et al.
patent: 5164599 (1992-11-01), Benveniste
patent: 6043499 (2000-03-01), Seki et al.
patent: 1 808 659 (1969-06-01), None
patent: 27 07 416 (1977-09-01), None
patent: 503211 (1939-04-01), None
patent: 60 079 655 (1985-05-01), None
patent: 62 058 536 (1987-03-01), None
patent: 63 126 147 (1988-05-01), None
patent: 401274350 (1989-11-01), None
patent: 06 267 493 (1994-09-01), None

Affiliated with

Also associated with

Rating

Apparatus for producing secondary electrons, a secondary... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for producing secondary electrons, a secondary..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for producing secondary electrons, a secondary... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4004024