Apparatus for positioning a stage

Details Apparatus for positioning a stage Apparatus for positioning a stage

1991-08-16

1994-06-21

Dzierzynski, Paul M.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

25044211, H01J 3720

Patent

active

053230124

ABSTRACT:
An apparatus for positioning a stage. A drive system moves the stage over a first range of motion in at least one direction. An actuator is coupled to the stage to produce a linear force to move the stage over a second range of motion. The second range of motion is less than the first range of motion. A sensor measures the stage position, and a controller controls the stage drive system and actuator.

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Principles of Feedback Control, vol. 2, .sctn.15.3.3, pp. 567-570 (1988) No Month.

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