Apparatus and method for producing a sectional view of a body

Apparatus and method for reducing the electron-beam-induced...

Apparatus and method for secondary electron emission microscope

Apparatus and method for secondary electron emission microscope

Apparatus and method for secondary electron emission microscope

Apparatus and method for secondary electron emission microscope

Apparatus and method for the absolute determination of the energ

Apparatus and method for tilted particle-beam illumination

Apparatus and method for tomography of microscopic samples

Apparatus and method for wafer pattern inspection

Apparatus and method for wafer pattern inspection

Apparatus and method including a direct bombardment detector...

Apparatus and method of aligning electron beam of scanning elect

Apparatus and method of pattern detection based on a scanning tr

Apparatus and methods for inspecting wafers and masks using mult

Apparatus and methods for secondary electron emission...

Apparatus and methods for secondary electron emission...

Apparatus and methods relating to ion implantation and heat tran

Apparatus for analysis employing electron

Apparatus for and method of real-time nanometer-scale position m