Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1995-12-21
1997-08-19
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250307, H01J 3726, G01N 2304
Patent
active
056591756
ABSTRACT:
A type of tomography is described, wherein occupancy of lattice sites in a microscopic sample of crystalline material is predicted. An electron beam is projected through the sample, at a specific angle, causing discernible spots in a detector, such as photographic film. Each spot corresponds to a row of atoms. The intensity of each spot indicates the number of atoms in the row, and the number is called a "line count." Projecting the electron beam at specific additional angles produces additional line counts. From all the line counts, a set of equations is derived. Each variable in the equations corresponds to a lattice site in the material. A solution to the equations is found by linear programming techniques, thus assigning a value to each variable. Each value indicates the probability of occupancy of a respective lattice site.
REFERENCES:
patent: 5227630 (1993-07-01), Saldin et al.
patent: 5475218 (1995-12-01), Kakibayashi et al.
patent: 5576543 (1996-11-01), Dingley
Schwander et al., Mapping Projected Potential . . . , Physical Review Letters, vol. 71, No. 25, pp. 4150-4153 Dec. 1993.
Fishburn Peter C.
Schwander Peter
Shepp Lawrence Allan
Vanderbei Robert Joseph
Berman Jack I.
Lucent Technologies - Inc.
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