Apparatus and method for reducing the electron-beam-induced...

Details Apparatus and method for reducing the electron-beam-induced... Apparatus and method for reducing the electron-beam-induced...

2006-02-28

2006-02-28

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S210000

Reexamination Certificate

active

07005638

ABSTRACT:
In a device for examining a specimen with an electron beam, in particular an SEM, TEM, or CSEM, contamination products are often result from the irradiation. To reduce these contamination products, the surface of the object irradiated with the electron beam is simultaneously illuminated with light, in particular with UV light.

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patent: 6105589 (2000-08-01), Vane
patent: 10-312765 (1998-11-01), None

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