Apparatus and method of pattern detection based on a scanning tr

Details Apparatus and method of pattern detection based on a scanning tr Apparatus and method of pattern detection based on a scanning tr

1989-06-28

1991-09-24

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250310, 250311, H01J 3728

Patent

active

050515853

ABSTRACT:
A pattern detection apparatus based on a scanning transmission electron microscope having an electron gun for generating and accelerating an electron beam, a plurality of convergent lenses for converging the electron beam, a deflection circuit for deflecting the electron beam so that it scans an object to be inspected, such as an X-ray mask, a detection circuit which receives electrons that have been dispersed and transmitted in the object and converts the detected electrons into an electrical signal, and an image forming circuit which forms a detected image of the object under test in response to the detected signal from the detection circuit and in synchronism with the deflection signal applied to the deflection circuit.

REFERENCES:
patent: 4031391 (1977-06-01), Hoppe
patent: 4219731 (1980-08-01), Migitaka et al.
patent: 4366380 (1982-12-01), Mirkin
patent: 4539593 (1985-09-01), Tutier et al.
patent: 4602282 (1986-07-01), Kurono et al.
patent: 4814615 (1989-03-01), Fushimi et al.
patent: 4894540 (1990-01-01), Komatsu
"Development of X-Ray Inspection System by E-Beam Probe", from Proceeding of the 101st Conference of the 132nd Committee on the Application of Charged Particle Beams to the Industry in Japanese Science Promotion Council, Nov. 1962, pp. 137-148.
"Microbeam Analysis" (Publication), pp. 199-206 and 141-162, 1980.

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