Apparatus for analysis employing electron

Details Apparatus for analysis employing electron Apparatus for analysis employing electron

1988-12-20

1989-12-26

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250289, H01J 3718

Patent

active

048899950

ABSTRACT:
An analysis system in which air in a specimen exchange chamber is evacuated by an oil-sealed rotary vacuum pump and which employs electron incorporates a purge gas supply means at the inlet side of the oil-sealed rotary vacuum pump. The purge gas supply means supplies a small quantity of purge gas when the air in the specimen exchange chamber is evacuated to the almost ultimate pressure of the pump.

REFERENCES:
patent: 3385102 (1968-05-01), Briggs
patent: 3668393 (1972-06-01), Von Rauch
Santeler, Jrnl. of Vacuum Science and Technology, vol. 8, No. 1, 1971, pp. 299-307.

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